Invention Application
- Patent Title: PHOTODETECTOR WITH INTEGRATED MICROFLUIDIC CHANNEL AND MANUFACTURING PROCESS THEREOF
- Patent Title (中): 具有集成微流通道的光电转换器及其制造工艺
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Application No.: US13925577Application Date: 2013-06-24
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Publication No.: US20140021330A1Publication Date: 2014-01-23
- Inventor: Alfio Russo , Giuseppina Valvo
- Applicant: STMicroelectronics S.r.l.
- Priority: ITTO2012A000634 20120718
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L31/18
Abstract:
A photodetector including: a photodiode having a body made of semiconductor material delimited by a first surface, the body forming a first electrode region; a dielectric region, set on top of the first surface and delimited by a second surface; at least one channel extending within the dielectric region, starting from the second surface; and a first metallization, which is set on top of the second surface and is in electrical contact with the first electrode region.
Public/Granted literature
- US09349904B2 Photodetector with integrated microfluidic channel and manufacturing process thereof Public/Granted day:2016-05-24
Information query
IPC分类:
