发明申请
- 专利标题： CORRUGATED MEMBRANE MEMS ACTUATOR
- 专利标题（中）： 腐蚀膜MEMS致动器
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申请号： US13552728申请日： 2012-07-19
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公开(公告)号： US20140022310A1公开(公告)日： 2014-01-23
- 发明人: Yonglin Xie , Qing Yang , James A. Katerberg
- 申请人： Yonglin Xie , Qing Yang , James A. Katerberg
- 主分类号： B41J2/05
- IPC分类号： B41J2/05
摘要：
A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A heater is associated with the second liquid chamber. A flexible corrugated membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber from each other.
公开/授权文献
- US08757780B2 Corrugated membrane MEMS actuator 公开/授权日：2014-06-24
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