发明申请
US20140027831A1 Method of eDRAM DT Strap Formation in FinFET Device Structure 有权
FinFET器件结构中eDRAM DT带形成的方法

Method of eDRAM DT Strap Formation in FinFET Device Structure
摘要:
The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.
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