发明申请
US20140027831A1 Method of eDRAM DT Strap Formation in FinFET Device Structure
有权
FinFET器件结构中eDRAM DT带形成的方法
- 专利标题: Method of eDRAM DT Strap Formation in FinFET Device Structure
- 专利标题(中): FinFET器件结构中eDRAM DT带形成的方法
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申请号: US13570379申请日: 2012-08-09
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公开(公告)号: US20140027831A1公开(公告)日: 2014-01-30
- 发明人: Veeraraghavan S. Basker , Sivananda Kanakasabapathy , Tenko Yamashita , Chun-Chen Yeh
- 申请人: Veeraraghavan S. Basker , Sivananda Kanakasabapathy , Tenko Yamashita , Chun-Chen Yeh
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.
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