发明申请
US20140028992A1 DRIVING SYSTEM AND DRIVING METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DRIVING SYSTEM DESIGN METHOD
有权
驱动系统和驱动方法，曝光装置和曝光方法以及驱动系统设计方法
- 专利标题： DRIVING SYSTEM AND DRIVING METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DRIVING SYSTEM DESIGN METHOD
- 专利标题（中）： 驱动系统和驱动方法，曝光装置和曝光方法以及驱动系统设计方法
-
申请号： US13981733申请日： 2012-01-27
-
公开(公告)号： US20140028992A1公开(公告)日： 2014-01-30
- 发明人: Hiroshi Fujimoto , Kazuaki Saiki , Koichi Sakata
- 申请人： Hiroshi Fujimoto , Kazuaki Saiki , Koichi Sakata
- 申请人地址： JP Tokyo JP Tokyo
- 专利权人： NIKON CORPORATION,THE UNIVERSITY OF TOKYO
- 当前专利权人： NIKON CORPORATION,THE UNIVERSITY OF TOKYO
- 当前专利权人地址： JP Tokyo JP Tokyo
- 优先权： JP2011-017265 20110128
- 国际申请： PCT/JP2012/000548 WO 20120127
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
At a carriage that shows a resonance mode in opposite phase to a resonance mode shown by a plate table where an interferometer which measures a position (a first controlled variable) of a plate stage driven according to a control input is installed, another interferometer is installed which measures a position (the second controlled variable) of the plate stage. By using the interferometer and the another interferometer, it becomes possible to design a driving system robust in a high bandwidth that drives the plate stage.