发明申请
US20140038112A1 AQUEOUS BASE-DEVELOPABLE NEGATIVE-TONE FILMS BASED ON FUNCTIONALIZED NORBORNENE POLYMERS
有权
基于功能化的NORBNNENE聚合物的水性基底发泡负离子膜
- 专利标题： AQUEOUS BASE-DEVELOPABLE NEGATIVE-TONE FILMS BASED ON FUNCTIONALIZED NORBORNENE POLYMERS
- 专利标题（中）： 基于功能化的NORBNNENE聚合物的水性基底发泡负离子膜
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申请号： US14050563申请日： 2013-10-10
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公开(公告)号： US20140038112A1公开(公告)日： 2014-02-06
- 发明人: Brian Knapp , Edmund Elce , Hendra Ng , Andrew Bell , Cheryl Burns , Sridevi Kaiti , Brian Kocher , Yogesh Patel , Masanobu Sakamoto , Xiaoming Wu , Wei Zhang
- 申请人： Promerus, LLC
- 申请人地址： US OH Brecksville
- 专利权人： Promerus, LLC
- 当前专利权人： Promerus, LLC
- 当前专利权人地址： US OH Brecksville
- 主分类号： G03F7/40
- IPC分类号： G03F7/40
摘要：
Embodiments in accordance with the present invention encompass negative-tone, aqueous base developable, self-imagable polymer compositions useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.
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