发明申请
US20140042124A1 FILM REMOVING METHOD, NOZZLE FOR REMOVING FILM, AND FILM REMOVING DEVICE
有权
薄膜去除方法，去除胶片的喷嘴和薄膜去除装置
- 专利标题： FILM REMOVING METHOD, NOZZLE FOR REMOVING FILM, AND FILM REMOVING DEVICE
- 专利标题（中）： 薄膜去除方法，去除胶片的喷嘴和薄膜去除装置
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申请号： US14113261申请日： 2012-04-11
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公开(公告)号： US20140042124A1公开(公告)日： 2014-02-13
- 发明人: Yoshinori Ikagawa
- 申请人： Yoshinori Ikagawa
- 申请人地址： JP Okayama
- 专利权人： TAZMO CO., LTD.
- 当前专利权人： TAZMO CO., LTD.
- 当前专利权人地址： JP Okayama
- 优先权： JP2011-097787 20110426
- 国际申请： PCT/JP2012/059847 WO 20120411
- 主分类号： B05C5/02
- IPC分类号： B05C5/02
摘要：
A film in a dry state is efficiently dissolved and removed. A film removing method includes steps of moving a nozzle head (10B) close to a soluble film (201) formed on a substrate (200), forming a liquid pool (302) of chemical liquid (300) between the nozzle head (10B) and the film (201) by continuously and simultaneously discharging and sucking the chemical liquid (300) from the nozzle head (10B), and horizontally moving the substrate (100) in a state in which the nozzle head (10B) and the surface of the film (201) are not contacted so as to relatively move the liquid pool (302) of the chemical liquid on the substrate (100).
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