发明申请
US20140042566A1 MECHANICAL QUANTITY MEASURING DEVICE, SEMICONDUCTOR DEVICE, EXFOLIATION DETECTING DEVICE, AND MODULE 审中-公开
机械量子测量装置,半导体器件,检测装置和模块

  • 专利标题: MECHANICAL QUANTITY MEASURING DEVICE, SEMICONDUCTOR DEVICE, EXFOLIATION DETECTING DEVICE, AND MODULE
  • 专利标题(中): 机械量子测量装置,半导体器件,检测装置和模块
  • 申请号: US14112626
    申请日: 2011-04-21
  • 公开(公告)号: US20140042566A1
    公开(公告)日: 2014-02-13
  • 发明人: Hiroyuki OtaKisho AshidaKentaro Miyajima
  • 申请人: Hiroyuki OtaKisho AshidaKentaro Miyajima
  • 申请人地址: JP Tokyo
  • 专利权人: HITACHI, LTD.
  • 当前专利权人: HITACHI, LTD.
  • 当前专利权人地址: JP Tokyo
  • 国际申请: PCT/JP2011/059860 WO 20110421
  • 主分类号: H01L41/04
  • IPC分类号: H01L41/04
MECHANICAL QUANTITY MEASURING DEVICE, SEMICONDUCTOR DEVICE, EXFOLIATION DETECTING DEVICE, AND MODULE
摘要:
A mechanical quantity measuring device (100) includes a semiconductor substrate (1) attached to a measured object so as to indirectly measure the mechanical quantity acting on the measured object; a measuring portion (7) capable of measuring a mechanical quantity acting on the semiconductor substrate (1) at a central part (1c) of the semiconductor substrate (1); and plural impurity diffused resistors (3a, 3b, 4a, 4b) forming a group (5) gathering closely to each other in at least one place, on an outer peripheral part (1e) outside the central part (1c) of the semiconductor substrate (1). The plural impurity diffused resistors (3a, 3b, 4a, 4b) forming one of the group (5) are connected to each other to form a Wheatstone bridge (2a, 2b). Thus, the mechanical quantity measuring device (100) can securely detect its own exfoliation.
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