Invention Application
US20140061471A1 AIRFLOW-ORGANIZATION TESTING METHOD FOR A CLEAN ROOM AND SYSTEM USING THE SAME METHOD
有权
使用相同方法的清洁室和系统的气流组织测试方法
- Patent Title: AIRFLOW-ORGANIZATION TESTING METHOD FOR A CLEAN ROOM AND SYSTEM USING THE SAME METHOD
- Patent Title (中): 使用相同方法的清洁室和系统的气流组织测试方法
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Application No.: US13704363Application Date: 2012-09-21
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Publication No.: US20140061471A1Publication Date: 2014-03-06
- Inventor: Li Li , Wanshi Jin
- Applicant: Li Li , Wanshi Jin
- Applicant Address: CN Beijing
- Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing
- Priority: CN201110289975.7 20110926
- International Application: PCT/CN2012/081773 WO 20120921
- Main IPC: G01N21/94
- IPC: G01N21/94

Abstract:
The present invention discloses an airflow-organization testing method for a clean room and a system using the same method, which are designed to solve the defects such as poor precision in the existing visual testing method. The airflow-organization testing method for a clean room according to the present invention uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas is a kind of gas, such as liquid nitrogen, dry ice or water vapor, with temperature difference from ambient air. The airflow-organization testing system for a clean room according to the present invention comprises a sample gas supplier and a thermal imaging device, wherein the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display. The airflow-organization testing method for a clean room according to the present invention has more accurate testing results and avoids contamination brought into the clean room; and, the detection devices employ mature technologies as well as high testing precision. The airflow-organization testing system for a clean room according to the present invention uses a sample gas supplier and a temperature detection device, thereby improving detection precision and expanding detection range.
Public/Granted literature
- US09057709B2 Airflow-organization testing method for a clean room and system using the same method Public/Granted day:2015-06-16
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