发明申请
US20140061656A1 Two Doping Regions in Lightly Doped Drain for Thin Film Transistors and Associated Doping Processes
有权
用于薄膜晶体管和相关掺杂过程的轻掺杂漏极中的两个掺杂区域
- 专利标题: Two Doping Regions in Lightly Doped Drain for Thin Film Transistors and Associated Doping Processes
- 专利标题(中): 用于薄膜晶体管和相关掺杂过程的轻掺杂漏极中的两个掺杂区域
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申请号: US13601535申请日: 2012-08-31
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公开(公告)号: US20140061656A1公开(公告)日: 2014-03-06
- 发明人: Cheng-Ho Yu , Young Bae Park , Shih Chang Chang
- 申请人: Cheng-Ho Yu , Young Bae Park , Shih Chang Chang
- 申请人地址: US CA Cupertino
- 专利权人: Apple Inc.
- 当前专利权人: Apple Inc.
- 当前专利权人地址: US CA Cupertino
- 主分类号: H01L27/15
- IPC分类号: H01L27/15 ; H01L33/08
摘要:
A method is provided for fabricating thin-film transistors (TFTs) for an LCD having an array of pixels. The method includes depositing a first photoresist layer over a portion of a TFT stack that includes a conductive gate layer, and a semiconductor layer. The method also includes doping the exposed semiconductor layer with a first doping dose. The method further includes etching a portion of the conductive gate layer to expose a portion of the semiconductor layer, and doping the exposed portion of the semiconductor layer with a second doping dose. The method also includes depositing a second photoresist layer over a first portion of the doped semiconductor layer in an active area of the pixels to expose a second portion of the doped semiconductor layer in an area surrounding the active area, and doping the second portion of the doped semiconductor layer with a third doping dose.
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