发明申请
US20140061656A1 Two Doping Regions in Lightly Doped Drain for Thin Film Transistors and Associated Doping Processes 有权
用于薄膜晶体管和相关掺杂过程的轻掺杂漏极中的两个掺杂区域

Two Doping Regions in Lightly Doped Drain for Thin Film Transistors and Associated Doping Processes
摘要:
A method is provided for fabricating thin-film transistors (TFTs) for an LCD having an array of pixels. The method includes depositing a first photoresist layer over a portion of a TFT stack that includes a conductive gate layer, and a semiconductor layer. The method also includes doping the exposed semiconductor layer with a first doping dose. The method further includes etching a portion of the conductive gate layer to expose a portion of the semiconductor layer, and doping the exposed portion of the semiconductor layer with a second doping dose. The method also includes depositing a second photoresist layer over a first portion of the doped semiconductor layer in an active area of the pixels to expose a second portion of the doped semiconductor layer in an area surrounding the active area, and doping the second portion of the doped semiconductor layer with a third doping dose.
信息查询
0/0