发明申请
- 专利标题: DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM
- 专利标题(中): 缺陷分类方法和缺陷分类系统
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申请号: US14112105申请日: 2012-04-16
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公开(公告)号: US20140072204A1公开(公告)日: 2014-03-13
- 发明人: Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
- 申请人: Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-093603 20110420
- 国际申请: PCT/JP2012/002609 WO 20120416
- 主分类号: G06T7/00
- IPC分类号: G06T7/00 ; G06K9/62
摘要:
In automatic defect classification, a classification recipe must be set for each defect observation device. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created. This defect classification system has a classification recipe storage unit; an information specification unit, the stage of a stored image, and device information. A corresponding defect specification unit specifies images of the same type of defect from images obtained from different image pickup devices at the same stage. An image conversion unit converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.
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