Invention Application
- Patent Title: TRIHALOSILANE REFINING DEVICE
- Patent Title (中): 三氧化硅精制装置
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Application No.: US14089528Application Date: 2013-11-25
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Publication No.: US20140076711A1Publication Date: 2014-03-20
- Inventor: Sung Kyu LEE , Joon Ho SHIN , Jong Ku LEE , Sung Kyun KIM
- Applicant: LG CHEM, LTD.
- Applicant Address: KR Seoul
- Assignee: LG CHEM, LTD.
- Current Assignee: LG CHEM, LTD.
- Current Assignee Address: KR Seoul
- Priority: KR10-2011-0117354 20111111
- Main IPC: B01D3/14
- IPC: B01D3/14 ; C01B33/107
Abstract:
A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.
Public/Granted literature
- US08974642B2 Trihalosilane refining method Public/Granted day:2015-03-10
Information query
