Invention Application
US20140077667A1 WAFER HANDLING STATION INCLUDING CASSETTE MEMBERS WITH LATERAL WAFER CONFINING BRACKETS AND ASSOCIATED METHODS
有权
WAFER处理站包括具有横向保持支架和相关方法的CASSETTE成员
- Patent Title: WAFER HANDLING STATION INCLUDING CASSETTE MEMBERS WITH LATERAL WAFER CONFINING BRACKETS AND ASSOCIATED METHODS
- Patent Title (中): WAFER处理站包括具有横向保持支架和相关方法的CASSETTE成员
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Application No.: US13622556Application Date: 2012-09-19
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Publication No.: US20140077667A1Publication Date: 2014-03-20
- Inventor: ROMOLO BACTASA
- Applicant: STMICROELECTRONICS PTE LTD.
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd.
- Current Assignee: STMicroelectronics Pte Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B23P17/00 ; H01L21/673
Abstract:
A wafer handling station includes a housing defining a chamber, and a wafer cassette assembly positionable in the chamber. The wafer cassette assembly includes a vertical support, and cassette members carried by the vertical support in spaced relation. Each cassette member includes a base coupled to the vertical support, wafer contact pads on an upper surface of the base and configured to support a wafer thereon, and a pair of wafer brackets carried by the base and configured to engage respective edges of the wafer to laterally confine the wafer.
Public/Granted literature
Information query
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