Invention Application
- Patent Title: INTEGRATED TRIAXIAL MAGNETOMETER OF SEMICONDUCTOR MATERIAL MANUFACTURED IN MEMS TECHNOLOGY
- Patent Title (中): MEMS技术制造的半导体材料的集成三光子计
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Application No.: US13905006Application Date: 2013-05-29
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Publication No.: US20140077798A1Publication Date: 2014-03-20
- Inventor: Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
- Applicant: STMicroelectronics S.r.l.
- Priority: ITTO2009A000973 20091210
- Main IPC: G01R33/028
- IPC: G01R33/028

Abstract:
Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.
Public/Granted literature
- US08760156B2 Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology Public/Granted day:2014-06-24
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