发明申请
- 专利标题: Thermal Sensor with Second-Order Temperature Curvature Correction
- 专利标题(中): 具有二阶温度曲率校正的热传感器
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申请号: US13632498申请日: 2012-10-01
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公开(公告)号: US20140092939A1公开(公告)日: 2014-04-03
- 发明人: Ching-Ho Chang , Jui-Cheng Huang , Yung-Chow Peng
- 申请人: Ching-Ho Chang , Jui-Cheng Huang , Yung-Chow Peng
- 主分类号: G01K7/01
- IPC分类号: G01K7/01 ; H01L23/544
摘要:
Some embodiments of the present disclosure relate to a stacked integrated chip structure having a thermal sensor that detects a temperature of one or a plurality of integrated chips. In some embodiments, the stacked integrated chip structure has a main integrated chip and a secondary integrated chip located on an interposer wafer. The main integrated chip has a reference voltage source that generates a bias current. The secondary integrated chip has a second thermal diode that receives the bias current and based thereupon generates a second thermal sensed voltage and a second reference voltage that is proportional to a temperature of the secondary integrated chip. A digital thermal sensor within the main integrated chip determines a temperature of the secondary integrated chip based upon as comparison of the second thermal sensed voltage and the reference voltage.
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