发明申请
- 专利标题： Method Of Identifying Airborne Molecular Contamination Source
- 专利标题（中）： 识别机载分子污染源的方法
-
申请号： US13632530申请日： 2012-10-01
-
公开(公告)号： US20140095083A1公开(公告)日： 2014-04-03
- 发明人: Tzu-Sou Chuang , Jeng-Jyi Hwang , Cheng-Lung Chou , Chi-Ming Yang , Chin-Hsiang Lin
- 申请人： Tzu-Sou Chuang , Jeng-Jyi Hwang , Cheng-Lung Chou , Chi-Ming Yang , Chin-Hsiang Lin
- 申请人地址： TW Hsin-Chu
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址： TW Hsin-Chu
- 主分类号： G01N33/00
- IPC分类号： G01N33/00 ; G06F15/00
摘要：
The present disclosure provides a method of identifying an airborne molecular contamination (AMC) leaking source in a fab. The method includes distributing a sensor in the fab, executing a forward computational fluid dynamics (CFD) simulation of an air flow in the fab, setting an inversed modeling of the forward CFD simulation of the air flow in the fab, building up a database of a spatial response probability distribution matrix of the sensor using an AMC measurement data in the fab, and identifying the AMC leaking source using the database of the spatial response probability distribution matrix of the sensor.
公开/授权文献
信息查询
