Invention Application
- Patent Title: SYSTEM, METHOD AND COMPUTED READABLE MEDIUM FOR EVALUATING A PARAMETER OF A FEATURE HAVING NANO-METRIC DIMENSIONS
- Patent Title (中): 用于评估具有纳米尺寸特征的参数的系统,方法和计算可读介质
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Application No.: US13787645Application Date: 2013-03-06
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Publication No.: US20140098211A1Publication Date: 2014-04-10
- Inventor: Yuval Yahav , Ofer Adan
- Applicant: APPLIED MATERIALS ISRAEL, LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee Address: IL Rehovot
- Main IPC: G01B15/00
- IPC: G01B15/00 ; H01J37/22

Abstract:
A non-transitory computer readable medium, a system and a method. The method may include obtaining, by an image obtaining module, an image of a measurement site, the measurement site comprise the feature, the image of the measurement site comprises an image of the feature; processing, by an image processor, the image of the measurement site to provide an artificial image, the artificial image comprise a artificial image of an artificial feature, the artificial feature differs from the feature; measuring a parameter of the artificial feature to provide a measurement result, wherein the measuring comprises applying a measurement algorithm that is inadequate for measuring the parameter of the feature; and determining a value of the parameter of the feature in response to the measurement result.
Public/Granted literature
Information query