Invention Application
- Patent Title: MEMS Device and Method of Manufacturing a MEMS Device
- Patent Title (中): MEMS器件和制造MEMS器件的方法
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Application No.: US13651372Application Date: 2012-10-12
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Publication No.: US20140103460A1Publication Date: 2014-04-17
- Inventor: Alfons Dehe , Stephan Pindl , Bernhard Knott , Carsten Ahrens
- Applicant: INFINEON TECHNOLOGIES AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/02
Abstract:
A method for manufacturing a MEMS device is disclosed. Moreover a MEMS device and a module including a MEMS device are disclosed. An embodiment includes a method for manufacturing MEMS devices includes forming a MEMS stack on a first main surface of a substrate, forming a polymer layer on a second main surface of the substrate and forming a first opening in the polymer layer and the substrate such that the first opening abuts the MEMS stack.
Public/Granted literature
- US09402138B2 MEMS device and method of manufacturing a MEMS device Public/Granted day:2016-07-26
Information query
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