Invention Application
US20140106095A1 ANODIC BONDING FOR A MEMS DEVICE 审中-公开
MEMS器件的阳极接合

  • Patent Title: ANODIC BONDING FOR A MEMS DEVICE
  • Patent Title (中): MEMS器件的阳极接合
  • Application No.: US14124946
    Application Date: 2012-06-07
  • Publication No.: US20140106095A1
    Publication Date: 2014-04-17
  • Inventor: Francois Bianchi
  • Applicant: Francois Bianchi
  • Applicant Address: CH Lausanne
  • Assignee: DEBIOTECH S.A.
  • Current Assignee: DEBIOTECH S.A.
  • Current Assignee Address: CH Lausanne
  • Priority: EP11169070.7 20110608
  • International Application: PCT/IB2012/052868 WO 20120607
  • Main IPC: B81C3/00
  • IPC: B81C3/00 B81B1/00
ANODIC BONDING FOR A MEMS DEVICE
Abstract:
The invention relates to a device comprising a wafer comprising a silicon area and a wafer comprising a glass area fastened to each other, the fastening zone thus formed between the wafers defining a multilayer structure comprising a first layer protecting the silicon from physical changes caused by attack of the surface, which layer covers the silicon area, and a second layer protecting the glass from physical changes caused by attack of the surface, which layer covers the glass area; said multilayer structure furthermore comprising at least one additional layer enabling anodic bonding between the two protective layers; said device containing at least one fluid channel protected by said protective layers and able to contain a solution temporarily.
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