Invention Application
- Patent Title: ANODIC BONDING FOR A MEMS DEVICE
- Patent Title (中): MEMS器件的阳极接合
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Application No.: US14124946Application Date: 2012-06-07
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Publication No.: US20140106095A1Publication Date: 2014-04-17
- Inventor: Francois Bianchi
- Applicant: Francois Bianchi
- Applicant Address: CH Lausanne
- Assignee: DEBIOTECH S.A.
- Current Assignee: DEBIOTECH S.A.
- Current Assignee Address: CH Lausanne
- Priority: EP11169070.7 20110608
- International Application: PCT/IB2012/052868 WO 20120607
- Main IPC: B81C3/00
- IPC: B81C3/00 ; B81B1/00

Abstract:
The invention relates to a device comprising a wafer comprising a silicon area and a wafer comprising a glass area fastened to each other, the fastening zone thus formed between the wafers defining a multilayer structure comprising a first layer protecting the silicon from physical changes caused by attack of the surface, which layer covers the silicon area, and a second layer protecting the glass from physical changes caused by attack of the surface, which layer covers the glass area; said multilayer structure furthermore comprising at least one additional layer enabling anodic bonding between the two protective layers; said device containing at least one fluid channel protected by said protective layers and able to contain a solution temporarily.
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