发明申请
- 专利标题： Deposition Of Films Comprising Aluminum Alloys With High Aluminum Content
- 专利标题（中）： 包含铝含量高的铝合金薄膜的沉积
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申请号： US14058406申请日： 2013-10-21
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公开(公告)号： US20140112824A1公开(公告)日： 2014-04-24
- 发明人: David Thompson , Srinivas Gandikota , Xinliang Lu , Wei Tang , Jing Zhou , Seshadri Ganguli , Jeffrey W. Anthis , Atif Noori , Faruk Gungor , Dien-Yeh Wu , Mei Chang , Shih Chung Chen
- 申请人： David Thompson , Srinivas Gandikota , Xinliang Lu , Wei Tang , Jing Zhou , Seshadri Ganguli , Jeffrey W. Anthis , Atif Noori , Faruk Gungor , Dien-Yeh Wu , Mei Chang , Shih Chung Chen
- 主分类号： C23C16/12
- IPC分类号： C23C16/12
摘要：
Provided are films comprising aluminum, carbon and a metal, wherein the aluminum is present in an amount greater than about 16% by elemental content and less than about 50% carbon. Also provided are methods of depositing the same.