Invention Application
US20140130735A1 MASK ASSEMBLY FOR THIN FILM VAPOR DEPOSITION AND MANUFACTURING METHOD THEREOF 有权
薄膜蒸发沉积掩模组件及其制造方法

  • Patent Title: MASK ASSEMBLY FOR THIN FILM VAPOR DEPOSITION AND MANUFACTURING METHOD THEREOF
  • Patent Title (中): 薄膜蒸发沉积掩模组件及其制造方法
  • Application No.: US14078008
    Application Date: 2013-11-12
  • Publication No.: US20140130735A1
    Publication Date: 2014-05-15
  • Inventor: Yong-Hwan Kim
  • Applicant: Samsung Display Co., Ltd.
  • Priority: KR10-2012-0129596 20121115
  • Main IPC: B05C21/00
  • IPC: B05C21/00 B05C11/00
MASK ASSEMBLY FOR THIN FILM VAPOR DEPOSITION AND MANUFACTURING METHOD THEREOF
Abstract:
A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction.
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