Invention Application
- Patent Title: MASK ASSEMBLY FOR THIN FILM VAPOR DEPOSITION AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 薄膜蒸发沉积掩模组件及其制造方法
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Application No.: US14078008Application Date: 2013-11-12
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Publication No.: US20140130735A1Publication Date: 2014-05-15
- Inventor: Yong-Hwan Kim
- Applicant: Samsung Display Co., Ltd.
- Priority: KR10-2012-0129596 20121115
- Main IPC: B05C21/00
- IPC: B05C21/00 ; B05C11/00

Abstract:
A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction.
Public/Granted literature
- US09187817B2 Mask assembly for thin film vapor deposition and manufacturing method thereof Public/Granted day:2015-11-17
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