发明申请
- 专利标题: CAPACITIVE HUMIDITY SENSOR
- 专利标题(中): 电容式湿度传感器
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申请号: US14116149申请日: 2012-05-22
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公开(公告)号: US20140139241A1公开(公告)日: 2014-05-22
- 发明人: Minekazu Sakai , Naohisa Niimi
- 申请人: Minekazu Sakai , Naohisa Niimi
- 申请人地址: JP Kariya-city, Aichi-pref.
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya-city, Aichi-pref.
- 优先权: JP2011-117195 20110525
- 国际申请: PCT/JP2012/003329 WO 20120522
- 主分类号: G01N27/22
- IPC分类号: G01N27/22
摘要:
A humidity sensor includes a detection device with a capacitance changing with humidity at a first ratio and a reference device with a capacitance changing with humidity at a second ratio smaller than the first ratio. The detection device has detection electrodes facing each other with a first gap and a detection humidity-sensitive film covering the detection electrodes. The reference device has reference electrodes facing each other with a second gap and a reference humidity-sensitive film covering the reference electrodes. The detection humidity-sensitive film and the reference humidity-sensitive film are made from the same material and have the same thickness. The detection electrodes and the reference electrodes are made from the same material and have the same width and thickness. The second ratio peaks when the second gap is equal to a predetermined value. The second gap is smaller than the first gap and the predetermined value.
公开/授权文献
- US09513245B2 Capacitive humidity sensor 公开/授权日:2016-12-06
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