Invention Application
- Patent Title: ELECTRON BEAM DEVICE, A GETTER SHEET AND A METHOD OF MANUFACTURING AN ELECTRON BEAM DEVICE PROVIDED WITH SAID GETTER SHEET
- Patent Title (中): 电子束装置，电子表格和制造提供有电子束装置的方法
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Application No.: US14126036Application Date: 2012-06-27
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Publication No.: US20140145589A1Publication Date: 2014-05-29
- Inventor: Werner Haag , Dominique Cloetta , Urs Hostettler , Benno Zigerlig , Toni Waber
- Applicant: Werner Haag , Dominique Cloetta , Urs Hostettler , Benno Zigerlig , Toni Waber
- Applicant Address: CH Pully
- Assignee: Tetral Laval Holdings & Finance S.A.
- Current Assignee: Tetral Laval Holdings & Finance S.A.
- Current Assignee Address: CH Pully
- Priority: SE1100521-2 20110704
- International Application: PCT/EP2012/062456 WO 20120627
- Main IPC: H01J7/18
- IPC: H01J7/18 ; H01J9/24
Abstract:
An electron beam device has a body provided with an exit window, said body is forming or is at least partly forming a vacuum chamber, the vacuum chamber comprising therein a cathode housing and at least one electron generating filament. At least one getter sheet is provided between the cathode housing and the filament. The invention is further comprising a getter sheet for use in an electron beam device and a method of manufacturing an electron beam device comprising at least one getter sheet.
Public/Granted literature
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