发明申请
- 专利标题: ELECTROMECHANICAL SYSTEMS HAVING SIDEWALL BEAMS
- 专利标题(中): 具有边框的机电系统
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申请号: US13737439申请日: 2013-01-09
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公开(公告)号: US20140192061A1公开(公告)日: 2014-07-10
- 发明人: Richard S. Payne , Nesbitt W. Hagood , Timothy J. Brosnihan , Joyce H. Wu , Mark B. Andersson , Jasper Lodewyk Steyn
- 申请人: PIXTRONIX, INC.
- 申请人地址: US CA San Diego
- 专利权人: Pixtronix, Inc.
- 当前专利权人: Pixtronix, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: G02B26/02
- IPC分类号: G02B26/02 ; G06T1/00
摘要:
This disclosure provides systems, methods and apparatus for electromechanical systems having sidewalls beams. In one aspect, a device includes a substrate having a first electrode and a second electrode, and a movable shuttle monolithically integrated with the substrate, and having a first wall, a second wall, and a base. The first and second walls each have a first dimension at least four times larger than a second dimension. The first and second walls define substantially parallel vertical sides of the shuttle, and the base is positioned orthogonally to the first and second walls and forms a horizontal bottom of the shuttle, providing structural support to the first and second walls. The first wall and the first electrode define a first capacitor, and the second wall and the second electrode define a second capacitor.
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