Invention Application
- Patent Title: PRESSURE SENSOR USING MEMS RESONATOR
- Patent Title (中): 使用MEMS谐振器的压力传感器
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Application No.: US14000673Application Date: 2013-02-12
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Publication No.: US20140202260A1Publication Date: 2014-07-24
- Inventor: Kunihiko Nakamura
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Priority: JP2012-050332 20120307
- International Application: PCT/JP2013/000742 WO 20130212
- Main IPC: G01L1/16
- IPC: G01L1/16 ; B81B3/00

Abstract:
A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.
Public/Granted literature
- US08826742B2 Pressure sensor using MEMS resonator Public/Granted day:2014-09-09
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