Invention Application
US20140202260A1 PRESSURE SENSOR USING MEMS RESONATOR 有权
使用MEMS谐振器的压力传感器

  • Patent Title: PRESSURE SENSOR USING MEMS RESONATOR
  • Patent Title (中): 使用MEMS谐振器的压力传感器
  • Application No.: US14000673
    Application Date: 2013-02-12
  • Publication No.: US20140202260A1
    Publication Date: 2014-07-24
  • Inventor: Kunihiko Nakamura
  • Applicant: Panasonic Corporation
  • Applicant Address: JP Osaka
  • Assignee: Panasonic Corporation
  • Current Assignee: Panasonic Corporation
  • Current Assignee Address: JP Osaka
  • Priority: JP2012-050332 20120307
  • International Application: PCT/JP2013/000742 WO 20130212
  • Main IPC: G01L1/16
  • IPC: G01L1/16 B81B3/00
PRESSURE SENSOR USING MEMS RESONATOR
Abstract:
A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.
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