Invention Application
- Patent Title: GAS SEPARATION BY ADJUSTABLE SEPARATION WALL
- Patent Title (中): 通过可调隔离壁进行气体分离
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Application No.: US13871789Application Date: 2013-04-26
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Publication No.: US20140208565A1Publication Date: 2014-07-31
- Inventor: Hans-Georg LOTZ , Neil MORRISON , Jose Manuel DIEGUEZ-CAMPO , Heike LANDGRAF , Tobias STOLLEY , Stefan HEIN , Florian RIES , Wolfgang BUSCHBECK
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Priority: EP13153501 20130131
- Main IPC: C23C16/458
- IPC: C23C16/458
Abstract:
An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit.
Information query
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