发明申请
- 专利标题: ANGULAR VELOCITY SENSOR
- 专利标题(中): 角速度传感器
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申请号: US14241950申请日: 2012-09-03
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公开(公告)号: US20140224015A1公开(公告)日: 2014-08-14
- 发明人: Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
- 申请人: Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
- 申请人地址: JP Toyama-shi, Toyama
- 专利权人: HOKURIKU ELECTRIC INDUSTRY CO., LTD.
- 当前专利权人: HOKURIKU ELECTRIC INDUSTRY CO., LTD.
- 当前专利权人地址: JP Toyama-shi, Toyama
- 优先权: JP2011-192127 20110902
- 国际申请: PCT/JP2012/072308 WO 20120903
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weight 3 is columnar or conic. The outline of an outer peripheral portion of a diaphragm 1 has such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodes 11 are respectively located in four regions partitioned by a first imaginary line L1 and a second imaginary line L2. Four angular velocity sensing electrodes 13 are respectively located in four regions partitioned by a first imaginary diagonal line CL1 and a second imaginary diagonal line Cl2.
公开/授权文献
- US09726490B2 Angular velocity sensor 公开/授权日:2017-08-08
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