发明申请
- 专利标题： METHOD FOR FORMING MAGNESIUM OXIDE THIN FILM AND PROCESSED PLATE
- 专利标题（中）： 形成氧化镁薄膜和加工板的方法
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申请号： US14343719申请日： 2012-03-09
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公开(公告)号： US20140230724A1公开(公告)日： 2014-08-21
- 发明人: Tomofumi Susaki , Hideo Hosono , Tadahiro Fujihashi , Yoshitake Toda
- 申请人： Tomofumi Susaki , Hideo Hosono , Tadahiro Fujihashi , Yoshitake Toda
- 申请人地址： JP Saitama
- 专利权人： JAPAN SCIENCE AND TECHNOLOGY AGENCY
- 当前专利权人： JAPAN SCIENCE AND TECHNOLOGY AGENCY
- 当前专利权人地址： JP Saitama
- 优先权： JP2011-197562 20110909
- 国际申请： PCT/JP2012/056191 WO 20120309
- 主分类号： C30B23/06
- IPC分类号： C30B23/06
摘要：
A method for depositing a magnesium oxide thin film on a substrate by a laser abrasion method using a sintered body or single crystal of magnesium oxide as a target. In this method, a flat processed film made of magnesium oxide having a (111) plane as its front surface is prepared, using a substrate made of strontium titanate having a (111) plane as its principal surface or yttria-stabilized zirconia having a (111) plane as its principal surface, by directly depositing a film on the principal surface of the substrate and epitaxially growing the film.