Invention Application
- Patent Title: SUBSTRATE SUPPORT WITH MULTI-PIECE SEALING SURFACE
- Patent Title (中): 基板支撑与多层密封表面
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Application No.: US13787402Application Date: 2013-03-06
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Publication No.: US20140251207A1Publication Date: 2014-09-11
- Inventor: OLKAN CUVALCI , GWO-CHUAN TZU , XIAOXIONG YUAN
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/683
- IPC: H01L21/683
Abstract:
Embodiments of substrate supports and sealing rings for use in a substrate support are provided herein. In some embodiments, a substrate support structure includes an arcuate sealing piece having a first side including a generally planar support surface; a first arcuate portion; a second arcuate portion disposed radially inward of the first arcuate portion; a first end portion comprising a first arcuate extension extending from the first arcuate portion; and a second end portion comprising a second arcuate extension extending from the second arcuate portion.
Public/Granted literature
- US09916994B2 Substrate support with multi-piece sealing surface Public/Granted day:2018-03-13
Information query
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