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US20140264299A1 ORGANIC LIGHT EMITTING DIODE DISPLAY AND MANUFACTURING METHOD THEREOF 有权
有机发光二极管显示及其制造方法

ORGANIC LIGHT EMITTING DIODE DISPLAY AND MANUFACTURING METHOD THEREOF
Abstract:
A method of manufacturing an organic light emitting diode (OLED) display includes forming a thin film transistor on a substrate; forming a first electrode electrically connected with the thin film transistor; forming a hole auxiliary layer on the first electrode; depositing an organic material on the hole auxiliary layer using a mask having an opening corresponding to the first electrode; forming an organic emission layer by partially eliminating the organic material through dry-etching, the dry-etching being performed to eliminate the organic material deposited outside of a boundary of the first electrode; forming an electron auxiliary layer on the organic emission layer; and forming a second electrode on the electron auxiliary layer.
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