Invention Application
- Patent Title: PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Patent Title (中): 等离子体蚀刻方法和等离子体蚀刻装置
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Application No.: US14219437Application Date: 2014-03-19
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Publication No.: US20140284308A1Publication Date: 2014-09-25
- Inventor: Shoichiro MATSUYAMA , Akitaka SHIMIZU , Susumu NOGAMI , Kiyohito ITO , Tokuhisa OHIWA , Katsunori YAHASHI
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-ku JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA,TOKYO ELECTRON LIMITED
- Current Assignee: KABUSHIKI KAISHA TOSHIBA,TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Minato-ku JP Minato-ku
- Priority: JP2013-061361 20130325
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
There are provided a plasma etching method and a plasma etching apparatus, capable of suppressing occurrence of local bias in etching rate and suppressing occurrence of charge-up damage. The plasma etching method of etching a silicon layer of a substrate to be processed using the plasma etching apparatus sets the pressure in a processing chamber to 13.3 Pa or more and applies, to a lower electrode, a first high-frequency power with a first frequency and a second high-frequency power with a second frequency that is lower than the first frequency and is a frequency of 1 MHz or lower.
Public/Granted literature
- US2109194A Brake mechanism Public/Granted day:1938-02-22
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