发明申请
US20140286616A1 Layer Having a Non-linear Taper and Method of Fabrication 有权
具有非线性锥度的层和制造方法

  • 专利标题: Layer Having a Non-linear Taper and Method of Fabrication
  • 专利标题(中): 具有非线性锥度的层和制造方法
  • 申请号: US14270014
    申请日: 2014-05-05
  • 公开(公告)号: US20140286616A1
    公开(公告)日: 2014-09-25
  • 发明人: Rene Gerrit HeidemanMarcel Hoekman
  • 申请人: OCTROLIX BV
  • 主分类号: G02B6/122
  • IPC分类号: G02B6/122 G02B6/136
Layer Having a Non-linear Taper and Method of Fabrication
摘要:
A method for forming a non-linear thickness-profile in a first layer of a first material is disclosed. The method comprises forming an accelerator layer of a second material on the first layer and forming a mask layer disposed on the accelerator layer, wherein the mask layer enables the accelerator layer to expose the first layer to a first etchant in a first region, where the exposure time for each point along a first axis varies non-linearly as a function of distance from a first point on the first axis. Since the time for which the first layer is exposed to the first etch in the first region is non-linear, the thickness of the first layer in the first region changes non-linearly along the first axis.
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