发明申请
- 专利标题: Layer Having a Non-linear Taper and Method of Fabrication
- 专利标题(中): 具有非线性锥度的层和制造方法
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申请号: US14270014申请日: 2014-05-05
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公开(公告)号: US20140286616A1公开(公告)日: 2014-09-25
- 发明人: Rene Gerrit Heideman , Marcel Hoekman
- 申请人: OCTROLIX BV
- 主分类号: G02B6/122
- IPC分类号: G02B6/122 ; G02B6/136
摘要:
A method for forming a non-linear thickness-profile in a first layer of a first material is disclosed. The method comprises forming an accelerator layer of a second material on the first layer and forming a mask layer disposed on the accelerator layer, wherein the mask layer enables the accelerator layer to expose the first layer to a first etchant in a first region, where the exposure time for each point along a first axis varies non-linearly as a function of distance from a first point on the first axis. Since the time for which the first layer is exposed to the first etch in the first region is non-linear, the thickness of the first layer in the first region changes non-linearly along the first axis.
公开/授权文献
- US09268089B2 Layer having a non-linear taper and method of fabrication 公开/授权日:2016-02-23
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