Computer-implemented methods and systems for providing revision control of integrated circuit device layout recipe files are provided. In an exemplary embodiment, a computer-implemented method for providing revision control of integrated circuit device layout recipe files includes storing recipe configuration files and recipe library files. Further, the method provides a user access to the recipe configuration files and recipe library files. The method includes creating with a computer a version snapshot of a selected recipe configuration file as revised by the user and of the other recipe configuration files and recipe library files as existing when the selected recipe configuration file is opened by the user. Further, the method includes providing the user access to all version snapshots for optical proximity correction (OPC) simulation.