发明申请
- 专利标题: PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
- 专利标题(中): 用于制造包含层的工艺和材料及其制品
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申请号: US14367426申请日: 2012-12-20
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公开(公告)号: US20140349431A1公开(公告)日: 2014-11-27
- 发明人: Adam Fennimore , Steven R. MacKara
- 申请人: E I DU PONT DE NEMOURS AND COMPANY
- 申请人地址: US DE Wilimington
- 专利权人: EI DU PONT DE NEMOURS AND COMPANY
- 当前专利权人: EI DU PONT DE NEMOURS AND COMPANY
- 当前专利权人地址: US DE Wilimington
- 国际申请: PCT/US12/70788 WO 20121220
- 主分类号: H01L51/56
- IPC分类号: H01L51/56 ; H01L51/00
摘要:
There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer including a fluorinated material and having a first surface energy; treating the first layer with a priming layer; exposing the priming layer patternwise with radiation having a wavelength greater than 300 nm, resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a patterned priming layer, wherein the patterned priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid deposition on the patterned priming layer on the first layer. The priming layer includes an aromatic amine compound and a photoinitiator.
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