Invention Application
- Patent Title: METHOD FOR DETERMINING A THREE-DIMENSIONAL STRESS FIELD OF AN OBJECT, AN INTEGRATED STRUCTURE IN PARTICULAR, AND CORRESPONDING SYSTEM
- Patent Title (中): 用于确定对象的三维应力场的方法，特定的集成结构和对应系统
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Application No.: US14311497Application Date: 2014-06-23
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Publication No.: US20140373640A1Publication Date: 2014-12-25
- Inventor: Vincent FIORI , Pierre BAR , Sébastien GALLOIS-GARREIGNOT
- Applicant: STMicroelectronics SA , STMicroelectronics (Crolles 2) SAS
- Priority: FR1356085 20130625
- Main IPC: G01L1/20
- IPC: G01L1/20
Abstract:
A method and corresponding system are provided for determining a three-dimensional stress field of an object having a flat surface. At least four flat resistors are placed on the flat surface of the object, with at least one of the resistors having a geometry different from that of the others. A variation of resistance of the resistors is measured. The three-dimensional stress field is determined from a system of equations involving the stress field, values of variations of the measured resistive values and sensitivity parameters of the resistors.
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