发明申请
US20150011983A1 Speckle Interferometric Method and System for Detecting a Movement of a Surface 审中-公开
斑点干涉测量方法和检测表面运动的系统

Speckle Interferometric Method and System for Detecting a Movement of a Surface
摘要:
A method and a system for detecting a movement of a surface on an irradiated sample involves a light source for irradiating the surface with a coherent light beam, a detector for detecting variations caused by the movement in a speckle pattern produced by reflections of the light beam at the surface, selecting a single speckle from the speckle pattern, and detecting the variations at the selected speckle.
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