Invention Application
US20150012246A1 THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD 有权
厚度测量装置和厚度测量方法

THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD
Abstract:
Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating first laser beam of a first wavelength λ1 to a transparent substrate and measuring intensity of first laser beam transmitting the transparent substrate; irradiating second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of second laser beam transmitting the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent ray by multiple internal reflection of the second laser beam is maintained at π/2.
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