Invention Application
US20150014771A1 DUAL L-SHAPED DRIFT REGIONS IN AN LDMOS DEVICE AND METHOD OF MAKING THE SAME
有权
LDMOS器件中的双L形缓冲区域及其制造方法
- Patent Title: DUAL L-SHAPED DRIFT REGIONS IN AN LDMOS DEVICE AND METHOD OF MAKING THE SAME
- Patent Title (中): LDMOS器件中的双L形缓冲区域及其制造方法
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Application No.: US13939353Application Date: 2013-07-11
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Publication No.: US20150014771A1Publication Date: 2015-01-15
- Inventor: David G. Brochu, JR. , John J. Ellis-Monaghan , Michael J. Hauser , Jeffrey B. Johnson , Xuefeng Liu
- Applicant: International Business Machines Corporation
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66

Abstract:
A semiconductor device comprising dual L-shaped drift regions in a lateral diffused metal oxide semiconductor (LDMOS) and a method of making the same. The LDMOS in the semiconductor device comprises a trench isolation region or a deep trench encapsulated by a liner, a first L-shaped drift region, and a second L-shaped drift region. The LDMOS comprising the dual L-shape drift regions is integrated with silicon-germanium (SiGe) technology. The LDMOS comprising the dual L-shape drift regions furnishes a much higher voltage drop in a lateral direction within a much shorter distance from a drain region than the traditional LDMOS does.
Public/Granted literature
- US09059281B2 Dual L-shaped drift regions in an LDMOS device and method of making the same Public/Granted day:2015-06-16
Information query
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