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Invention Application
US20150014796A1 Device with MEMS Structure and Ventilation Path in Support Structure 有权
具有MEMS结构的装置和支撑结构中的通风路径

  • Patent Title: Device with MEMS Structure and Ventilation Path in Support Structure
  • Patent Title (中): 具有MEMS结构的装置和支撑结构中的通风路径
  • Application No.: US13941318
    Application Date: 2013-07-12
  • Publication No.: US20150014796A1
    Publication Date: 2015-01-15
  • Inventor: Alfons Dehe
  • Applicant: Infineon Technologies AG
  • Main IPC: B81B3/00
  • IPC: B81B3/00
Device with MEMS Structure and Ventilation Path in Support Structure
Abstract:
A device includes a support structure, a sound port disposed in the support structure, and a MEMS structure including a membrane acoustically coupled to the sound port. The membrane separates a first space contacting a first side of the membrane from a second space contacting an opposite second side of the membrane. The device further includes an adjustable ventilation path disposed in the support structure and extending from the sound port to the second space.
Abstract(Chinese):

一种装置包括支撑结构，设置在支撑结构中的声音端口，以及包括声耦合到声音端口的膜的MEMS结构。 膜将与膜的第一侧接触的第一空间与接触膜的相对的第二侧的第二空间分离。 该装置还包括设置在支撑结构中并从声音端口延伸到第二空间的可调整的通风路径。

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