发明申请
- 专利标题: IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- 专利标题(中): 印刷装置及其制造方法
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申请号: US14326662申请日: 2014-07-09
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公开(公告)号: US20150014892A1公开(公告)日: 2015-01-15
- 发明人: Ken-ichiro SHINODA
- 申请人: CANON KABUSHIKI KAISHA
- 优先权: JP2013-145841 20130711
- 主分类号: B29C59/02
- IPC分类号: B29C59/02 ; B29C59/00
摘要:
The present invention provides an imprint apparatus which forms a pattern on an imprint material on a substrate by using a mold, including a first optical member interposed between an illumination optical system and a detection optical system, and a mold, and configured to guide a first light from the illumination optical system and a second light from the detection optical system to the mold, and a second optical member interposed between the first optical member and the detection optical system, and configured to transmit the second light which is reflected by a mark formed on the mold or a mark formed on the substrate and travels toward the detection optical system through the first optical member, and block the first light which travels toward the detection optical system through the first optical member.
公开/授权文献
- US09625837B2 Imprint apparatus and method of manufacturing article 公开/授权日:2017-04-18
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