- 专利标题: PRODUCTION OF TRISILYLAMINE FROM MONOCHLOROSILANE AND AMMONIA BY USE OF INERT SOLVENT
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申请号: US14344793申请日: 2012-11-06
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公开(公告)号: US20150023859A1公开(公告)日: 2015-01-22
- 发明人: Carl-Friedrich Hoppe , Hartwig Rauleder , Christian Goetz
- 申请人: Carl-Friedrich Hoppe , Hartwig Rauleder , Christian Goetz
- 申请人地址: DE Essen
- 专利权人: Evonik Industries AG
- 当前专利权人: Evonik Industries AG
- 当前专利权人地址: DE Essen
- 优先权: DE102011088814.4 20111216
- 国际申请: PCT/EP12/71873 WO 20121106
- 主分类号: C01B33/00
- IPC分类号: C01B33/00 ; B01D3/00
摘要:
The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage.
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