发明申请
- 专利标题： DISCHARGE IONIZATION CURRENT DETECTOR AND METHOD FOR AGING TREATMENT OF THE SAME
- 专利标题（中）： 放电电流电流检测器及其治疗方法
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申请号： US14382600申请日： 2012-03-15
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公开(公告)号： US20150054521A1公开(公告)日： 2015-02-26
- 发明人: Shigeyoshi Horiike , Kei Shinada , Takahiro Nishimoto
- 申请人： Shigeyoshi Horiike , Kei Shinada , Takahiro Nishimoto
- 申请人地址： JP Kyoto
- 专利权人： SHIMADZU CORPORATION
- 当前专利权人： SHIMADZU CORPORATION
- 当前专利权人地址： JP Kyoto
- 国际申请： PCT/JP2012/056674 WO 20120315
- 主分类号： G01N27/68
- IPC分类号： G01N27/68
摘要：
An aging treatment is performed by using cleaning gas obtained by mixing inert gas, as an impurity, to plasma gas. Plasma generation by dielectric-barrier discharge is performed until a predetermined period of time has elapsed by applying high AC voltage to an electrode while supplying the cleaning gas to a dielectric tube from a gas inlet.
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