发明申请
- 专利标题: METHOD FOR REDUCING THE DIMENSIONALITY OF A SPATIALLY REGISTERED SIGNAL DERIVED FROM THE OPTICAL PROPERTIES OF A SAMPLE, AND DEVICE THEREFOR
- 专利标题(中): 用于降低从样品的光学性质衍生的空间注册信号的尺寸的方法及其装置
-
申请号: US14386658申请日: 2013-03-21
-
公开(公告)号: US20150055136A1公开(公告)日: 2015-02-26
- 发明人: Robert Alexander Huber , Thomas Klein , Wolfgang Wieser
- 申请人: Robert Alexander Huber , Thomas Klein , Wolfgang Wieser
- 申请人地址: DE Munchen
- 专利权人: Ludwig Maximilians Universitat Munchen
- 当前专利权人: Ludwig Maximilians Universitat Munchen
- 当前专利权人地址: DE Munchen
- 优先权: DE102012102424.3 20120321
- 国际申请: PCT/EP2013/000866 WO 20130321
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
At least one embodiment of the method is designed to create a two-dimensional image of a three-dimensional sample. The method comprises the following steps: provision of a wave-length-tunable light source (1) that emits primary radiation (P) with wavelengths that vary over time; sampling of location points of the sample (2) with the primary radiation (P); collection of secondary radiation (S), wherein the secondary radiation (S) is a part of the primary radiation (P) reflected by the sample (2); creation of an interferometer-based detection signal for a plurality of sample areas, each with at least one location point, using a detection unit (4), wherein the detection signal is created as a difference signal from two output signals of a beam splitter (61) that receives reference radiation (R) and/or secondary radiation (S) at two inputs, wherein the reference radiation (R) is a portion of the primary radiation (P) that is not guided to the sample (2); and determination of a brightness value for at least one of the sample areas from the associated detection signal, wherein the determination of the brightness values is not substantially based on the summation of the individual signal amplitudes of the results of a Fourier transformation.