发明申请
- 专利标题: WAFER LOADERS HAVING BUFFER ZONES
- 专利标题(中): 具有缓冲区的WAFER装载机
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申请号: US14281880申请日: 2014-05-19
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公开(公告)号: US20150068948A1公开(公告)日: 2015-03-12
- 发明人: Yi Koan HONG , Byung Lyul PARK , Jumyong PARK , Jisoon PARK , Kyu-Ha LEE , Siyoung CHOI
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2013-0109201 20130911
- 主分类号: H01L21/673
- IPC分类号: H01L21/673
摘要:
Embodiments of the present inventive concepts provide a wafer loader having one or more buffer zones to prevent damage to a wafer loaded in the wafer loader. The wafer loader may include a plurality of loading sections that protrude from a main body and are configured to be arranged at various locations along an edge of the wafer. Each of the loading sections may include a groove into which the edge of the wafer may be inserted. The loading section may include first and second protrusions having first and second inner sides, respectively, that face each other to define the groove therebetween. At least one of the first and second inner sides may include a recess to define the buffer zone.
公开/授权文献
- US09502274B2 Wafer loaders having buffer zones 公开/授权日:2016-11-22