Invention Application
- Patent Title: EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Patent Title (中): 极光紫外线发光装置和超极紫外线发光系统
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Application No.: US14555963Application Date: 2014-11-28
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Publication No.: US20150083939A1Publication Date: 2015-03-26
- Inventor: Yoshifumi UENO , Osamu WAKABAYASHI
- Applicant: GIGAPHOTON INC.
- Priority: JP2012-121704 20120529
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet light generation device may be configured to generate extreme ultraviolet light by irradiating a target with a laser beam to turn the target into plasma. The extreme ultraviolet light generation device may comprise: a chamber provided with at least one through-hole; an optical system configured to introduce the laser beam into a predetermined region in the chamber through the at least one through-hole; and a target supply device configured to supply a powder target as the target to the predetermined region.
Information query