Invention Application
US20150083939A1 EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开
极光紫外线发光装置和超极紫外线发光系统

  • Patent Title: EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
  • Patent Title (中): 极光紫外线发光装置和超极紫外线发光系统
  • Application No.: US14555963
    Application Date: 2014-11-28
  • Publication No.: US20150083939A1
    Publication Date: 2015-03-26
  • Inventor: Yoshifumi UENOOsamu WAKABAYASHI
  • Applicant: GIGAPHOTON INC.
  • Priority: JP2012-121704 20120529
  • Main IPC: H05G2/00
  • IPC: H05G2/00
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Abstract:
An extreme ultraviolet light generation device may be configured to generate extreme ultraviolet light by irradiating a target with a laser beam to turn the target into plasma. The extreme ultraviolet light generation device may comprise: a chamber provided with at least one through-hole; an optical system configured to introduce the laser beam into a predetermined region in the chamber through the at least one through-hole; and a target supply device configured to supply a powder target as the target to the predetermined region.
Information query
Patent Agency Ranking
0/0