发明申请
- 专利标题： Coating equipment for composite membrane without diffusion pump and its thickness gauge for both thick and thin coatings
- 专利标题（中）： 无扩散泵的复合膜涂层设备及其厚薄薄层厚度计
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申请号： US14063198申请日： 2013-10-25
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公开(公告)号： US20150114289A1公开(公告)日： 2015-04-30
- 发明人: Shengfan Chen , Xiandong Chen , Yuna Jiang , Shengzhen Chen , Fajie Chen
- 申请人： Shanghai Honghao Enterprise Development CO., LTD
- 申请人地址： CN Fengxian District
- 专利权人： Shanghai Honghao Enterprise Development CO., LTD
- 当前专利权人： Shanghai Honghao Enterprise Development CO., LTD
- 当前专利权人地址： CN Fengxian District
- 主分类号： B05C11/02
- IPC分类号： B05C11/02 ; B05C1/00
摘要：
A coating equipment for composite membrane without diffusion pump and its thickness gauge for both thick and thin coatings comprises a coating equipment for composite membrane without diffusion pump and a thickness gauge for both thick and thin coatings. A vacuum pump system of the coating equipment for composite membrane without diffusion pump is a roots-type pump system. Compared to conventional diffusion pumps, roots-type pump have advantages of low energy consumption, stable performance, good vacuum-pumping effect, short starting time, etc.
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