发明申请
- 专利标题: VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
- 专利标题(中): 垂直存储器件及其制造方法
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申请号: US14519285申请日: 2014-10-21
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公开(公告)号: US20150115345A1公开(公告)日: 2015-04-30
- 发明人: Etienne Nowak , Dae-Sin Kim , Hye-Young Kwon , Jae-Ho Kim , Jin-Woo Park , Ji-Woong Sue
- 申请人: Etienne Nowak , Dae-Sin Kim , Hye-Young Kwon , Jae-Ho Kim , Jin-Woo Park , Ji-Woong Sue
- 优先权: KR10-2013-0127781 20131025
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/31
摘要:
A vertical memory device includes a channel, a conductive pattern, gate electrodes, a bit line and a conductive line. A plurality of the channels and the conductive patterns extend in a vertical direction from a top surface of a substrate. The gate electrodes surround outer sidewalls of the channels and the conductive patterns. The gate electrodes are stacked in the vertical direction to be spaced apart from each other. The bit line is electrically connected to the channels. The conductive line is electrically connected to the conductive patterns.
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