Invention Application
US20150129769A1 Measurement Method for Object to be Measured 审中-公开
测量对象的测量方法

Measurement Method for Object to be Measured
Abstract:
A method for measuring the presence or absence of an object to be measured in a specimen or the quantity thereof. The method includes filtrating the object to be measured from the specimen using as a physical filter, a void-arranged structural body having a plurality of void portions penetrating in a direction perpendicular to a primary surface thereof so as to hold the object to be measured by the void-arranged structural body; irradiating an electromagnetic wave on the void-arranged structural body holding the object to be measured; and detecting characteristics of an electromagnetic wave scattered by the void-arranged structural body.
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