发明申请
- 专利标题: WAFER DICING PRESS AND METHOD AND SEMICONDUCTOR WAFER DICING SYSTEM INCLUDING THE SAME
- 专利标题(中): 包括其相同方法和方法以及半导体波片定位系统
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申请号: US14510246申请日: 2014-10-09
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公开(公告)号: US20150140783A1公开(公告)日: 2015-05-21
- 发明人: Won-chul Lim
- 申请人: Won-chul Lim
- 优先权: KR10-2011-0010308 20110201
- 主分类号: H01L21/78
- IPC分类号: H01L21/78
摘要:
In a wafer dicing press for reducing time and cost for wafer dicing and for evenly applying a dicing pressure to a whole wafer, a wafer dicing press includes a support unit supporting a first side of a wafer; and a pressurization device applying a pressure, by dispersing the pressure, to a second side of the wafer so that a laser-scribed layer of the wafer operates as a division starting point. Accordingly, the wafer dicing press reduces laser radiation and pressure-application times for dividing a wafer into semiconductor devices. This increased efficiency is achieved without increasing the likelihood of damaging the wafer.
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