发明申请
- 专利标题: APPARATUS AND METHOD FOR POLISHING AND STRENGTHENING SUBSTRATE
- 专利标题(中): 抛光和加强基材的装置和方法
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申请号: US14302227申请日: 2014-06-11
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公开(公告)号: US20150144593A1公开(公告)日: 2015-05-28
- 发明人: Joo Woan Cho , Seungho Kim
- 申请人: Samsung Display Co., Ltd.
- 优先权: KR10-2013-0144705 20131126
- 主分类号: B24B17/08
- IPC分类号: B24B17/08 ; C03C15/02 ; B24B1/00
摘要:
An apparatus and method for polishing and strengthening a substrate are disclosed. In one aspect, the apparatus includes a table on which a substrate is placed, a powder supply portion for polishing a surface of the substrate, a substance supply portion, and an injector. The powder supply portion is placed over the table. The substance supply portion is configured to supply a substance onto the polished surface of the substrate. The injector is configured to inject the powder from the powder supply portion onto the surface of the substrate and the substance from the substance supply portion onto the polished surface of the substrate.
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