发明申请
- 专利标题: ELECTRONIC ELEMENT SEALING METHOD AND BONDED SUBSTRATE
- 专利标题(中): 电子元件密封方法和粘结基板
-
申请号: US14407721申请日: 2013-06-14
-
公开(公告)号: US20150171365A1公开(公告)日: 2015-06-18
- 发明人: Tadatomo Suga , Yoshiie Matsumoto
- 申请人: Tadatomo SUGA , LAN TECHNICAL SERVICE CO., LTD.
- 申请人地址: JP Shinjuku-ku, Tokyo
- 专利权人: LAN TECHNICAL SERVICE CO., LTD.
- 当前专利权人: LAN TECHNICAL SERVICE CO., LTD.
- 当前专利权人地址: JP Shinjuku-ku, Tokyo
- 优先权: JP2012-135898 20120615
- 国际申请: PCT/JP2013/066446 WO 20130614
- 主分类号: H01L51/52
- IPC分类号: H01L51/52 ; H01L51/56
摘要:
[Problem] The aim of the invention is to provide a method of sealing an electronic element such as an organic EL element using a normal temperature bonding method that enables bonding at low temperature and in which permeation of external gases such as hydrogen or oxygen through the sealed section (dam) formed by the organic material, or the junction interface of the sealed section and a cover substrate is suppressed. [Solution] A method of sealing an electronic element comprises a step of forming a sealing section by forming a sealing section including an organic material on the surface of a first substrate formed with the electronic element, surrounding this electronic element with a thickness that is larger than that of this electronic element; a step of forming a first inorganic material layer in which a first inorganic material layer is formed at least on the exposed surface of this sealing section; and a substrate bonding step of bonding the first substrate and the second substrate by pushing together the sealing section of the first substrate and the junction location of the second substrate.
公开/授权文献
- US09331305B2 Electronic element sealing method and bonded substrate 公开/授权日:2016-05-03
信息查询
IPC分类: